Просветляющие покрытия на основе ZnO, полученные методом электронно-лучевого испарения

نویسندگان

چکیده

In this work, research was carried out to analyze the possibility fabricate nanostructured antireflection coatings based on ZnO. The dependence of structural features film substrate heating temperature during deposition an aluminum-doped zinc oxide (AZO) has been studied. It is shown that it impossible obtain required properties by changing one parameter, material, in range 20 – 600 °C. For purpose, approach suggested, which consists preliminary a nanometer-thick Sn layer with subsequent up main material layer. optimization coating conditions led fabrication medium consisting many whiskers transverse dimensions tens nanometers and length hundreds nanometers, are oriented mainly perpendicular substrate. gradient nature change density, and, hence, effective refractive index direction plane, provides over wide wavelengths as well different directions light propagation.

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ژورنال

عنوان ژورنال: Fizika i tehnika poluprovodnikov

سال: 2021

ISSN: ['0015-3222', '1726-7315']

DOI: https://doi.org/10.21883/ftp.2021.12.51714.9712